Anric Technologies was founded to address the gap in the market for ALD tools designed and optimized for small samples and small budgets. The AT400 Benchtop ALD tool yields high quality thin films in a system that costs half of the lead competitor’s offerings. LC Technology Solutions has teamed up with Anric to deliver this new ALD system with a glovebox in one cost effective package. Contact us today to discuss your specialized system!

  • Up to 4” diameter sample
  • Chamber temperatures from RT to 350°C ± 1°C
  • Precursor temperatures from RT to 150°C ± 2°C with optional heating jackets
  • Variable process pressure control 0.1 to 1.5 torr
  • All metal sealed system upstream of sample
  • Smallest footprint on market, cleanroom compatible
  • Precise precursor dosing with defined dose volumes
  • Streamlined chamber design and small chamber volume
  • Robust 7″ touchscreen PLC control system
  • Simple system maintenance and integrated vacuum interlock
  • 3 organometallic sources standard
  • 2 counter reactants standard
  • Pre-installed, proven process recipes and process development support for the duration of tool ownership